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Comptes Rendus Chimie
Sous presse. Epreuves corrigées par l'auteur. Disponible en ligne depuis le vendredi 15 juin 2012
Doi : 10.1016/j.crci.2012.05.011
Received : 17 February 2012 ;  accepted : 11 May 2012
Macroporous silicon and its application in sensing
 

Ralf B. Wehrspohn a, b, Stefan L. Schweizer a, ⁎ , Benjamin Gesemann a, Daniel Pergande a, Torsten M. Geppert a, Susanne Moretton c, Armin Lambrecht c
a Microstructure-based materials design group, Institute of physics, Martin-Luther-University Halle-Wittenberg, 06112 Halle, Germany 
b Fraunhofer Institute for Mechanics of Materials, Halle, Germany 
c Fraunhofer Institute for Physical Measurement Technique, Freiburg, Germany 

Corresponding author.
Abstract

Periodic silicon nanostructures can be used for different kinds of gas sensors depending on the analyte concentration. First, we present an optical gas sensor based on the classical non-dispersive infrared technique for ppm-concentration using ultra-compact photonic crystal gas cells (Pergande et al., 2011) [1]. It is conceptually based on low group velocities inside a photonic crystal gas cell and anti-reflection layers coupling light into the device. Secondly, we report on silicon nanotip arrays (Gesemann et al., 2011) [2], suitable for gas ionization in ion mobility microspectrometers (micro-IMS) having detection ranges in principle down to the ppt-range. Such instruments allow the detection of explosives, chemical warfare agents, and illicit drugs, e.g., at airports. Third of all, we describe the thermal emission properties of heated silicon photonic crystals (Gesemann et al., 2010) [3], revealing a photonic stop gap effect or strong silicon oxide emission, depending on the setup. All silicon microstructures have been fabricated by photo-electrochemical etching of silicon.


Keywords : Silicon, Photonic crystals, Gas sensing, Infrared, Ion mobility microspectrometer, Thermal emission


OutlineMasquer le plan
Introduction  (+)
Fabrication of the silicon microstructures  (+)
Measurements  (+)
Discussion
Conclusion


© 2012  Published by Elsevier Masson SAS de la part de Académie des sciences.
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